Electronic grade ammonia (G5)-Luoyang Hongchang Industry and Trade Co.

Introduction

Electronic grade ammonia

Main content 29%
Impurity metal ion content<10PPT
Product grade G5
Main application:removing particles from the surface of semiconductor materials,and can be used as the main raw material for the production of chemicals such as electronic grade ammonium fluoride.

Production process of electronic grade ammonia G5

1.Raw material pre-treatment:Using industrial grade liquid ammonia or ammonia gas as raw material,the particles and impurities are first removed through multi-stage filtration.For example,liquid ammonia is filtered using screen filters(pore size from 0.1mm to 0.02mm)to remove micron-sized particles.
2.Oxidation:The filtered liquid ammonia enters an eccentric jet microporous reactor,which reacts with an oxidizing solution(e.g.,potassium permanganate solution or hydrogen peroxide solution)to oxidize low-valent sulfide to sulfate,thus removing sulfide impurities.
3.Vaporization and drying:The oxidized liquid ammonia is transported to the evaporator,where it is vaporized by electric or steam heating.Subsequently,the ammonia gas enters the drying tower to remove the water therein.
4.Purification and Refining:The vaporized ammonia gas passes through the corona chamber for corona purification to remove mist impurities and micro-nano particles.The purified ammonia gas is then filtered through multi-stage microporous membrane(pore size from 50nm to 2nm)to further remove impurities.
5.Absorption and filtration:The purified ammonia gas reacts with ultrapure water to generate ammonia water in an absorption tower.The ammonia water in the absorption tower is circulated and absorbed by a reflux pump to ensure that the ammonia gas is fully dissolved.The generated ammonia is further filtered by ultra-clean filtration device(e.g.PTFE membrane),and finally high purity electronic grade ammonia is obtained.
6.Quality control and storage:Each step in the production process is monitored and controlled by an automated control system to ensure the purity and quality of the ammonia.The final product is stored in special containers to prevent contamination by impurities.

Electronic grade ammonia (G5)
Project	Unit	Indicator		Project	Unit	Indicator
Content	%	29±1		Gold	ppb		0.01
Chromaticity	APHA	10		Germanium	ppb		0.01
Chloride (Ci)	ppb		10	Lead	ppb		0.01
Nitrate (NO₃)	ppb		20	Lithium	ppb		0.01
Sulfate (SO₄² -)	ppb		20	Magnesium	ppb		0.01
Phosphate(PO³)	ppb		10	Manganese	ppb		0.01
Carbonate (CO₃² - )	ppm		1	Molybdenum	ppb		0.01
Reduced potassium permanganate(KMnO₄)	ppm		0.5	Nickel	ppb		0.01
Combustion residue	ppm		0.5	Silver	ppb		0.01
Total Organic Carbon TOC	ppm		1	Potassium	ppb		0.01
Aluminum	ppb	<	0.01	Selenium	ppb		0.01
Antimony	ppb	<	0.01	Silver	ppb		0.01
Arsenic	ppb	<	0.01	Sodium	ppb		0.01
Barium	ppb	<	0.01	Strontium	ppb		0.01
Beryllium	ppb		0.01	Tantalum	ppb		0.01
Bismuth	ppb		0.01	Thallium	ppb	<	0.01
Zirconium	ppb		0.01	Tin	ppb		0.01
Cadmium	ppb		0.01	Titanium	ppb	<	0.01
Calcium	pb		0.01	Vanadium	ppb	<	0.01
Chromium	ppb		0.01	Tungsten	ppb		0.01
Cobalt	ppb		0.01	Iron	ppb		0.01
Copper	ppb		0.01	Zinc	ppb		0.01
Gallium	ppb		0.01	Silicon	ppb		0.01
Platinum	ppb		0.01	Boron	ppb	<	0.01
Mercury	ppb		0.01
Particles >0.1um	pcs/ml		40
Particles >0.2um	pcs/ml		15
Particles >0.5um	pcs/ml		2

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